Beilstein J. Nanotechnol.2021,12, 633–664, doi:10.3762/bjnano.12.52
; focused helium ion beam-induced deposition; focusedheliumionbeammilling; helium ion beam lithography; helium ion implantation; Introduction
Since the helium ion microscope (HIM) was introduced 15 years ago [1][2][3], over one hundred HIMs have been installed worldwide and over one thousand research
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Figure 1: (a) Schematic diagram of the helium ion microscope. Adapted with permission from Cambridge Universi...